Development of Miniature Spectrometers
摘要
Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.
引用本文（GB/T 7714）
Zhiguo Zhang. Development of Miniature Spectrometers[J]. 半导体光子学与技术：英文版, 2007.
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