Diamond breakage on CMP pad conditioner

Liu、Ping-Hsiao、Sung、James、Hsu -、Kai-Hung、Michael Michael

2008Acta Scientiarum Naturalium Universitatis SunyatseniEngineering被引 1

摘要

Diamond grits may be thermally weakened during the high temperature cycle of brazing.This weakening may exhibit as diamond breakage.During the dressing action,taller diamond grits are more likely to break due to the higher stress present.

引用本文（GB/T 7714）

Liu, Ping-Hsiao, Sung, 等. Diamond breakage on CMP pad conditioner[J]. Acta Scientiarum Naturalium Universitatis Sunyatseni, 2008.

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