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A STUDY OF THE PIEZOELECTRIC PROPERTIES OF GaAs

黄庆安吕世骥童勤义

1991东南大学学报:英文版Engineering被引 2

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摘要

The origin of the piezoelectric effect of GaAs is discussed in some detail.TheGa atoms are negatively charged and As atoms positively charged.The piezoelectric con-stant tensors for arbitrarily oriented GaAs have been obtained.It is verified that for nor-mal stress when the GaAs samples are oriented in the 〈111〉 direction the maximumpiezoelectric effect occurs.As far as the piezoelectric properties and fabrication technologyare concerned,〈100〉 oriented GaAs substratcs are fit for the force sensors.

引用本文(GB/T 7714)

黄庆安, 吕世骥, 童勤义. A STUDY OF THE PIEZOELECTRIC PROPERTIES OF GaAs[J]. 东南大学学报:英文版, 1991.

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