Effect of Seed Layer on the Orientation of Zinc Oxide Film on Silicon Substrate
摘要
The effect of seed layer on the orientation of ZnO film was investigated. Before the preparation of ZnO film using sol-gel method, seed layer of ZnO was prepared in a similar way using the precursor at a rather low concentration.Experiments show that the existence of seed layer can improve the orientation of the finally prepared ZnO film, while baking temperature, baking time and precursor concentration all have effects on the final results.
引用本文（GB/T 7714）
Xiao Xiao, Makoto Makoto, Kuwabara. Effect of Seed Layer on the Orientation of Zinc Oxide Film on Silicon Substrate[J]. Acta Scientiarum Naturalium Universitatis Sunyatseni, 2005.
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