YBa{sub 2}Cu{sub 3}O{sub 7{delta}x} superconducting microstrip filters on dielectric substrate
摘要
The microstrip filters, such as multipole lowpass filter and multipole bandpass filter have been designed, fabricated and characterized. The YBa{sub 2}Cu{sub 3}O{sub 7{minus}{delta}} (YBCO) epitaxial thin films on MgO substrates were grown in situ at 760 C by pulsed laser deposition. The design of filters in a microstrip configuration and their microwave responses were simulated by microwave design simulator, respectively. The filter patterns on the laser ablated YBCO/MgO film were generated using conventional photolithography and ECR-etching process. The performance of filters was measured as a function of temperature and frequency. Microwave loss properties were superior for the filters patterned from HTS films to for the filters fabricated from Au-metal films of same dimensions.