Room temperature NO2 gas sensing of Au-loaded tungsten oxide nanowires/porous silicon hybrid structure
摘要
In this work, we report an enhanced nitrogen dioxide（NO2） gas sensor based on tungsten oxide（WO3）nanowires/porous silicon（PS） decorated with gold（Au） nanoparticles. Au-loaded WO3 nanowires with diameters of 10 nm–25 nm and lengths of 300 nm–500 nm are fabricated by the sputtering method on a porous silicon substrate. The high-resolution transmission electron microscopy（HRTEM） micrographs show that Au nanoparticles are uniformly distributed on the surfaces of WO3 nanowires. The effect of the Au nanoparticles on the NO2-sensing performance of WO3 nanowires/porous silicon is investigated over a low concentration range of 0.2 ppm–5 ppm of NO2 at room temperature（25℃）. It is found that the 10-? Au-loaded WO3 nanowires/porous silicon-based sensor possesses the highest gas response characteristic. The underlying mechanism of the enhanced sensing properties of the Au-loaded WO3 nanowires/porous silicon is also discussed.