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Study on the Method for Measuring Nano-Displacement

Qiang Li

2001Physics and Astronomy被引 2

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摘要

A new method for measuring nano-displacement is discussed. The resolution of shift is as far as 1 nm. The principle of quantum tunneling effects was used to design the instrument. With the tunnel between the sample and the needlepoint and under the control of closed loop system, the instrument works at constant current mode, so that the high precision displacement can be got.

引用本文(GB/T 7714)

Qiang Li. Study on the Method for Measuring Nano-Displacement[J]. 未知来源, 2001.

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