太赫兹微测辐射热计的设计、仿真与制备
摘要
The authors made optimal design on micro-bridge structure of uncooled microbolometer operated in terahertz (THz) range to improve detection sensitivity. A nickel-chromium (NiCr) thin film with a thickness of 10 nm acting as THz absorption layer was added and the absorption area of the cell was expanded. IntelliSuite was used for mechanical and thermal simulations by finite element analysis of micro-bridge structures with different unit sizes and different bridge leg widths. Results revealed that deformation was significantly increased with the increased cell area. A small range decrease of deformation was achieved by using wider legs. Temperature rise of bridge was enhanced by increasing the cell area and reducing the width of bridge legs. THz microbolometer focal plane arrays based on the designed structures were manufactured and the results agreed well with the simulations. The structure with a unit size of 75 μm×75 μm and a leg width of 1.3 μm was suitable for THz microbolometer for its good mechanical and thermal properties.