微纳机电系统(MEMS/NEMS)前沿
摘要
The micro-nanoelectromechanical systems (MEMS/NEMS, herein called MEMS for simplicity), which the originate from microelectronics technology, can deal with the thermal, optical, magnetic, chemical, and biological variables. Various structures and devices can be fabricated on a chip through the integration technology. In the last few decades, MEMS has played increasingly important roles in aerospace, military, optical communication, wireless communication, biomedicine, etc., and MEMS products have been widely used in our daily lives. Due to the highly multidisciplinary nature, MEMS shows a diverse research and development trend. This report will discuss the status and trend of the development of MEMS fundamental research. The discussion will focus on the fusion of MEMS technology with integrated circuits, nanotechnology, and modern biotechnology. The strong intervention of the TSMC, the largest IC foundry in the world, in MEMS foundry industry greatly accelerates the pace of integration of MEMS and IC. More and more new nano-materials and nanofabrication technologies have been applied in MEMS technology to promote the performance and the emergence of new devices. On the other hand, NEMS technology provides new nanoscale three-dimensional processing approaches for novel CMOS devices, and spawns new types of IC devices, such as NEMS relays and nano-mechanical memories. The combination with the biotechnology becomes a new growth point of MEMS, where the exible electrode and circuit is one of the typical representatives.