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Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses

安然李焱窦艳萍方瀛杨宏龚旗煌

2004Acta Scientiarum Naturalium Universitatis SunyatseniEngineering被引 1

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摘要

Using tightly focused femtosecond laser pulses, we have drilled micro-holes from the front and rear surface of soda-lime glass in ambient air. The machined holes have small aspect ratio or irregular inner walls. When the drilling is conducted from the rear surface in contact with distilled water, a good quality micro-hole with a high aspect ratio can be obtained. The corresponding formation mechanisms are investigated.

引用本文(GB/T 7714)

安然, 李焱, 窦艳萍, 等. Laser Micro-Hole Drilling of Soda-Lime Glass with Femtosecond Pulses[J]. Acta Scientiarum Naturalium Universitatis Sunyatseni, 2004.

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