Interfacial characteristics of Al/Al2O3/ZnO/n-GaAs MOS capacitor
摘要
The interfacial characteristics of Al/Al2O3/ZnO/n-GaAs metal-oxide-semiconductor (MOS) capacitor are investigated. The results measured by X-ray photoelectron spectroscopy (XPS) and high-resolution transmission electron microscopy (HRTEM) show that the presence of ZnO can effectively suppress the formations of oxides at the interface between the GaAs and gate dielectric and gain smooth interface. The ZnO-passivated GaAs MOS capacitor exhibits a very small hysteresis and frequency dispersion. Using the Terman method, the interface trap density is extracted from C-V curves. It is found that the ZnO layer can effectively improve the interface quality.
引用本文（GB/T 7714）
刘琛, 张玉明, 张义门, 等. Interfacial characteristics of Al/Al2O3/ZnO/n-GaAs MOS capacitor[J]. 中国物理B：英文版, 2013.
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