HIGH TEMPERATURE DISPLACEMENT SENSOR
摘要
A high temperature displacement sensor based on the principle of eddy-current is investigated. A new temperature compensation technique by using eddy-current effect is presented to satisfy the special requirement at high temperature up to 550℃. The experiment shows that the temperature compensation technique leads to good temperature stability for the sensors. The variation of the sensitivity as well as the temperature drift of the sensor with temperature compensation technique is only about 7.4% and 90～350 mV at 550℃ compared with that at room temperature, and that of the sensor without temperature compensation technique is about 31.2% and 2～3 V at 550℃ compared with that at room temperature. A new dynamic calibration method for the eddy-current displacement sensor is presented, which is very easy to be realized especially in high frequency and at high temperatures. The high temperature displacement sensors developed are successfully used at temperature up to 550℃ in a magnetic bearing system for more than 100 h.