Thermal Stability of W/C Multilayer Films

Yasuo Takagi、Steven A. Flessa、Keith L. Hart、D. A. Pawlik、Alan M. Kadin、James L. Wood、J. E. Keem、John E. Tyler

1985Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIEMaterials Science被引 17

摘要

W(10A)/C(40A), W(15A)/C(15A) and W(40A)/C(10A) periodic multilayer films were prepared by magnetron sputtering and subsequently annealed at 730°C. The resulting change of the layered and crystal structures was studied by X-ray diffraction. The resulting structures largely depended on the thickness ratio of W to C. For example, in the W(15Å)/C(15Å) sample a-W as formed without any peaks of carbon crystals; in W(40Å) C(10Å)only W2C (orthorhombic) peaks appeared.

引用本文（GB/T 7714）

Yasuo Takagi, Steven A. Flessa, Keith L. Hart, 等. Thermal Stability of W/C Multilayer Films[J]. Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 1985.

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DOI：https://doi.org/10.1117/12.949653

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