积分散射测量在激光陀螺超光滑基片质量检测中的应用
摘要
Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h.
引用本文（GB/T 7714）
Zhimeng Wei, Xingwu Long, Kaiyong Yang. 积分散射测量在激光陀螺超光滑基片质量检测中的应用[J]. Chinese Optics Letters, 2010.
引文网络
本站仅收录题录与摘要供学习参考，全文版权归属出版方；如有侵权请联系我们删除。