基于基因算法补偿几何误差的空间相移干涉术
摘要
We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.
引用本文（GB/T 7714）
Invited Paper. 基于基因算法补偿几何误差的空间相移干涉术[J]. Chinese Optics Letters, 2009.
引文网络
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