Vacuum Electron—Beam Evaporation of Fe Nanocrystals on Si3N4 Buffer Layer for carbon Nanotube Growth
摘要
Vacuum electron-beam evaporated iron nanocrystal is used for the growth of carbon nanotubes.Atomic force microscopy and Raman Scattering studies reveal the formation of beta-iron silicide islands on are silicon sulbstrate after annealing at 700℃in N2 ambient.In order to eliminate the influence of iron-silicon interactio,Si3N4 buffer layer with the thickness of 80nm is used.This technical route prevents effectively the formation of iron silicide and improves the quality of the iron nanocrystals.Using these iron nanocrystal with high density(about 7×10^10/cm^2)as catalyst,high-density multiwall carbon nanotubes are synthesized on Si3N4/Si substrate.
引用本文（GB/T 7714）
万青, 王太宏. Vacuum Electron—Beam Evaporation of Fe Nanocrystals on Si3N4 Buffer Layer for carbon Nanotube Growth[J]. Acta Scientiarum Naturalium Universitatis Sunyatseni, 2003.
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