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Influence of reaction parameters on synthesis of high-quality single-layer graphene on Cu using chemical vapor deposition

杨贺申承民田园王高强林少雄张一顾长志李俊杰

2014中国物理B:英文版Materials Science被引 1

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摘要

Large-area monolayer graphene samples grown on polycrystalline copper foil by thermal chemical vapor deposition with differing CH4 flux and growth time are investigated by Raman spectra, scanning electron microscopy, atomic force microscopy, and scanning tunneling microscopy. The defects, number of layers, and quality of graphene are shown to be controllable through tuning the reaction conditions: ideally to 2–3 sccm CH4 for 30 minutes.

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杨贺, 申承民, 田园, 等. Influence of reaction parameters on synthesis of high-quality single-layer graphene on Cu using chemical vapor deposition[J]. 中国物理B:英文版, 2014.

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