Fabrication and characterization of Ce: YIG thin film
摘要
Yttrium iron garnet (YIG) is widely used for microwave ferrite devices,especially for optical isolators. In this paper,ferrite ceramic target using cerium (Ce)-substituted YIG was made using ferric oxide (Fe2O3), cerium oxide (CeO2) and yttrium oxide (Y2O3) powders as raw material. Ce:YIG thin films were fabricated by radio frequency (RF) magnetron sputtering. The experimental result showed that the polycrystalline YIG was obtained after sintering at 1350℃ for 6h,and the polycrystalline Ce:YIG thin films were achieved annealing up to 700℃ in the air.
引用本文(GB/T 7714)
Yang, Shuming, Zhang, 等. Fabrication and characterization of Ce: YIG thin film[J]. 中国工程科学:英文版, 2013.
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