Preparation of YBa 2 Cu 3 O 7-x Superconductor Film by Ion Beam Sputtering

1989Acta Scientiarum Naturalium Universitatis SunyatseniEngineering被引 0

摘要

Since the discovery of high T_c super-conductor, much effort was made toits application. More and more evidencehas revealed that most promising fieldof high T_c superconductor first to havesuccess must be the microelectronics andcomputer. Superconductor films for mi-croelectronic application are preparedby PVD method, such as electron beamevaporation, pulsed laser evaporation andmagnetron sputtering. In this paper, thepreliminary results of ion beam sputteringdeposition of YBaCuO film are reported

引用本文（GB/T 7714）

胡倾宇, 闻立时, 乔桂文, 等. Preparation of YBa 2 Cu 3 O 7-x Superconductor Film by Ion Beam Sputtering[J]. Acta Scientiarum Naturalium Universitatis Sunyatseni, 1989.

引文网络

参考文献与被引分析加载中…

本站仅收录题录与摘要供学习参考，全文版权归属出版方；如有侵权请联系我们删除。